Advanced Oxidation Processes (AOP)

Wastewater treatment in the semiconductor industry

Advanced oxidation for the treatment of semiconductor wastewater

In the semiconductor industry, complex manufacturing processes (such as chemical-mechanical polishing CMP) with very high quality criteria result in a large variety of different production effluents in Wafer-Fabs with a number of potentially problematic ingredients such as

- complexing agents/ chelates (such as cyanide or PBTC)
- Metal ions (such as copper from the machined surfaces)
- Organo-nitrogen compounds (such as pyrazole)
- Excess H2O2 from production processes like etching processes with piranha acid / peroxymonosulfuric acid
- Toxic compounds
- compounds with poor biodegradability

In semiconductor production, all these substances partly enter the wastewater as a mixture and meet in the wastewater plant. This complex mixture and the - individually seen already problematic - contents place conventional methods for waste water treatment before difficult tasks, particularly if an economical, pollution free and compact treatment is demanded.

Modern and sustainable treatment of wastewater in semiconductor production

Advanced Oxidation for wastewater in wafer fabs

With oxidation processes (Advanced Oxidation Process, Advanced UV-Oxidation Process, UV-Oxidation) from Enviolet, for example for the semiconductor industry, technically sophisticated and individually adaptable solutions for the handling of the above mentioned compounds can be realized in wafer fabs through advanced oxidation processes.

- Complexing agents (such as cyanide or PBTC)
    can be degraded by UV-oxidation -> treatment of chelate wastewater
- Metal ions (such as copper from the machined surfaces)
    can be separated after the elimination of complex images by conventional treatment (such as precipitation)
- Toxic or interfering individual compounds (e.g. piranha acid)
    can be reliably removed by UV-oxidation -> degradation of single substances
- Organo-nitrogen compounds (such as pyrazole)
    can be effectively degraded by AOP processes
- compounds with poor biodegradability
    become biodegradable through Advanced Oxidation -> increase of biodegradability
- Excess H2O2 from production processes
    can be removed without problems. We often combine this with the joint treatment of other problem wastewaters.

Enviolet's UV-based AOP (Advanced Oxidation Process Equipment) systems are able to treat even optically dense media in wafer fabs economically and are ideally suited for all applications in the semiconductor and photovoltaic industry. A major advantage of the UV-AOP processes is that no secondary waste of problematic nature is produced, as is the case with other processes (precipitation, evaporation, etc.). In the semiconductor industry we often combine our oxidation processes with biological oxidation (municipal or industrial).

Treatment of semiconductor waste water by advanced oxidation

AOP for wafer fabs in different applications for wastewater treatment (e.g. for slurry wastewater)

Advanced oxidation processes of enviolet can be customized by feasibility studies to ensure an optimal result of the oxidation of the semiconductor waste water in compliance with all limits.
For the pilot phase a.c.k. aqua concept GmbH offers a wide range of pilot plants for rent.